A Layered SAW Device Based on ZnO/LiTaO3 for Liquid Media Sensing Applications
نویسندگان
چکیده
Surface Acoustic Wave (SAW) sensors comprising a zinc oxide guiding layer deposited on a 36°-YX lithium tantalate substrate were developed. They were found to have greater mass sensitivity than other LiTaO3 based SAW sensors, such as the SiO2/LiTaO3 configuration. In this paper, the fabrication of the ZnO/LiTaO3 sensor is described and micro-characterisation of the deposited films is presented. Sensitivity of these devices to surface mass and dielectric perturbations is then presented, followed by an analysis of temperature stability.
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تاریخ انتشار 2009